Last Update: 07 November, 2019.
Features
-
Through-focus computation of point-spread functions
-
Aberration retrieval from through-focus intensity data
-
Extension to high-NA systems and extended objects
-
Image simulations for extended objects
-
Applications in optical lithography
-
ANZ: acoustical Nijboer-Zernike approach
Authors
Joseph J.M. Braat+, Peter Dirksen*, Sven van Haver+, Augustus J.E.M. Janssen#
#Eindhoven University of Technology , P.O. Box 513, 5600 MB Eindhoven,
The Netherlands
+Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
*Philips Research Europe, HTC 4, 5656 AE Eindhoven, The Netherlands
+Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
*Philips Research Europe, HTC 4, 5656 AE Eindhoven, The Netherlands