Extended NijboerZernike Analysis and Aberration Retrieval
Journal papers 1.
A.J.E.M. Janssen, "Extended
NijboerZernike approach for the computation of optical pointspread functions," J. Opt. Soc. Am. A 19 (2002), pp. 849857.
2.
J.J.M.
Braat, P. Dirksen, A.J.E.M. Janssen, "Assessment
of an extended NijboerZernike approach for the computation of optical
pointspread functions," J. Opt. Soc. Am. A 19 (2002), pp. 858870.
3. P. Dirksen, J.J.M. Braat, A.J.E.M. Janssen, C.A.H. Juffermans, "Aberration retrieval using the extended NijboerZernike approach," Journal of Microlithography, Microfabrication, and Microsystems 2 (2003), pp. 6168. 4. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, A. van de Nes, "Extended NijboerZernike representation of the field in the focal region of an aberrated highaperture optical system," J. Opt. Soc. Am. A 20 (2003), pp. 22812292; also in Virtual Journal of Biological Physics Research 6 (2003), issue 12. 5. A.J.E.M. Janssen, J.J.M. Braat, P. Dirksen, "On the computation of the NijboerZernike aberration integrals at arbitrary defocus," J. Mod. Opt. 51 (2004), pp. 687703. 6. C. van der Avoort, J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, "Aberration retrieval from the intensity pointspread function in the focal region using the extended NijboerZernike approach," J. Mod. Opt. 52 (2005), pp. 16951728. 7. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, A.S. van de Nes, S. van Haver "Extended NijboerZernike approach to aberration and birefringence retrieval in a highnumericalaperture optical system," J. Opt. Soc. Am. A. 22 (2005), pp. 26352650. 8. P. Dirksen, J.J.M. Braat, A.J.E.M. Janssen, "Estimating resist parameters using the Extended NijboerZernike theory," Journal of Microlithography, Microfabrication, and Microsystems 5 (2006), 013005, pp. 111. 9. S. van Haver, J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, "HighNA aberration retrieval with the extended NijboerZernike vector diffraction theory," J. Eur. Opt. Soc. Rapid Publ. 1 (2006), 06004, pp. 18. 10. A.J.E.M. Janssen, P. Dirksen, "Concise formula for the Zernike coefficients of scaled pupils," Journal of Microlithography, Microfabrication, and Microsystems 5 (2006), 030501, pp. 13. 11. A.J.E.M. Janssen, S. van Haver, J.J.M. Braat, P. Dirksen, "Strehl ratio and optimum focus of highnumericalaperture beams," J. Eur. Opt. Soc. Rapid Publ. 2 (2007), 07008, pp. 19. 12. S. van Haver, J.J.M. Braat, P. Dirksen, A. J.E.M. Janssen, "HighNA aberration retrieval with the extended NijboerZernike vector diffraction theory  Erratum," J. Eur. Opt. Soc. Rapid Publ. 2 (2007), 07011e, p. 1. 13. A.J.E.M. Janssen, P. Dirksen, "Computing Zernike polynomials of arbitrary degree using the discrete Fourier transform," J. Eur. Opt. Soc. Rapid Publ. 2 (2007), 07012, pp. 13. 14. J.J.M. Braat, S. van Haver, A.J.E.M. Janssen, P. Dirksen, "Energy and momentum flux in a highnumericalaperture beam using the extended NijboerZernike diffraction formalism," J. Eur. Opt. Soc. Rapid Publ. 2 (2007), 07032, pp. 113. 15. A.J.E.M. Janssen, S. van Haver, P. Dirksen, J.J.M. Braat, "Zernike representation and Strehl ratio of optical systems with variable numerical aperture," J. Mod. Opt. 55 (2008), pp. 11271157. 16. R.M. Aarts, J.J.M. Braat, P. Dirksen, S. van Haver, C. van Heesch, A.J.E.M. Janssen, "Analytic expressions and approximations for the onaxis, aberrationfree Rayleigh and Debye integral in the case of focusing fields on a circular aperture," J. Eur. Opt. Soc. Rapid Publ. 3 (2008), 08039, pp. 110. 17. S. van Haver, J.J.M. Braat, A.J.E.M. Janssen, O.T.A. Janssen, S.F. Pereira, "Vectorial aerialimage computations of threedimensional objects based on the extended NijboerZernike theory," J. Opt. Soc. Am. A 26 (2009), pp. 12211234. 18. J.J.M. Braat, S. van Haver, A.J.E.M. Janssen, S.F. Pereira, "Image formation in a multilayer using the Extended NijboerZernike theory," J. Eur. Opt. Soc. Rapid Publ. 4 (2009), 09048, pp. 112. 19. H.P. Urbach, O.T.A. Janssen, S. van Haver, A.J.H. Wachters, "On the modeling of optical systems containing elements of different scales," J. Mod. Opt. iFirst (2010), pp. 113. 20. A.J.E.M. Janssen, "New analytic results for the Zernike circle polynomials from a basic result in the NijboerZernike diffraction theory," J. Eur. Opt. Soc. Rapid Publ. 6 (2011), 11028, pp. 114. 21. A.J.E.M. Janssen, "Computation of Hopkins' 3circle integrals using Zernike expansions," J. Eur. Opt. Soc. Rapid Publ. 6 (2011), 11059, pp. 16. 22. J.J.M. Braat, A.J.E.M. Janssen, "Double Zernike expansion of the optical aberration function from its power series expansion," J. Opt. Soc. Am. A 30 (2013), pp. 12131222. 23. S. van Haver, A.J.E.M. Janssen, "Advanced analytic treatment and efficient computation of the diffraction integrals in the Extended NijboerZernike theory," J. Eur. Opt. Soc. Rapid Publ. 8 (2013), 13044, pp. 129. 24. A. P. Konijnenberg, L. Wei, N. Kumar, L. Couto Correa Pinto Filho, L. Cisotto, S. F. Pereira, H. P. Urbach, "Demonstration of an optimised focal field with long focal depth and high transmission obtained with the Extended NijboerZernike theory," Opt. Express 22 (2014), pp. 311–324. 25. A.J.E.M. Janssen, "Zernike expansion of derivatives and Laplacians of the Zernike circle polynomials," J. Opt. Soc. Am. A 31 (2014), pp. 16041613. 26. S. van Haver, A.J.E.M. Janssen, "Truncation of the series expressions in the advanced ENZtheory of diffraction integrals," J. Eur. Opt. Soc. Rapid Publ. 9 (2014), 14042, pp. 113. 27. J.J.M. Braat, A.J.E.M. Janssen, "Derivation of various transfer functions of ideal or aberrated imaging systems from the threedimensional transfer function," J. Opt. Soc. Am. A 32 (2015), pp. 11461159. 28. R.S. Biesheuvel, A.J.E.M. Janssen, P. Pozzi, S.F. Pereira, "Implementation and benchmarking of a crosstalkfree method for wavefront Zernike coefficients reconstruction using ShackHartmann sensor data," OSA Continuum 1(2) (2018), pp. 581603.
Book chapters 1. J.J.M. Braat, S. van Haver, A.J.E.M. Janssen, P. Dirksen, "Assessment of optical systems by means of pointspread functions," in Progress in Optics, Vol. 51, E. Wolf, ed., (Elsevier, Amsterdam, The Netherlands, 2008), pp. 349468. Ph.D. Dissertations 1. A.S. van de Nes, "Rigorous Electromagnetic Field Calculations for Advanced Optical Systems," Ph. D. Dissertation Delft University of Technology (2005), pp. 1164. 2. S. van Haver, "The Extended NijboerZernike diffraction theory and its applications," Ph. D. Dissertation Delft University of Technology (2010), pp. 1176. Master thesis 1. S. van Haver, "Extended NijboerZernike diffraction and aberration retrieval theory for highnumericalaperture optical imaging systems," December 2005. Conference Proceedings 1. P. Dirksen, J.J.M. Braat, P. De Bisschop, A.J.E.M. Janssen, C.A.H. Juffermans, Alvina Williams, "Characterization of a projection lens using the extended NijboerZernike approach," Proc. SPIE 4691, Santa Clara, March 2002, pp. 13921399. 2. P. Dirksen, J. Braat, A.J.E.M. Janssen, C. Juffermans, A. Leeuwestein, "Experimental determination of lens aberrations from the intensity pointspread function in the focal region," Proc. SPIE 5040, Santa Clara, February 2003, pp. 110. 3. P. Dirksen, J. Braat, A.J.E.M. Janssen, A. Leeuwestein, H. Kwinten, D. Van Steenwinckel, "Determination of resist parameters using the extended NijboerZernike theory," Proc. SPIE 5377, Santa Clara, February 2004, pp. 150159. 4. P. Dirksen, J.J.M. Braat, A.J.E.M. Janssen, A. Leeuwestein, "Aberration retrieval for highNA optical systems using the extended NijboerZernike theory," Proc. SPIE 5754, San Jose, USA, FebruaryMarch 2005, pp. 262273. 5. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, "Throughfocus pointspread function evaluation for lens metrology using the extended NijboerZernike theory," in Fringe 2005 (W. Osten, ed.), Springer, Berlin, 2005, pp. 299307. 6. P. Dirksen, J.J.M. Braat, A.J.E.M. Janssen, A. Leeuwestein, T. Matsuyama, T. Noda, "Aerial image based lens metrology for wafer steppers," Proc. SPIE 6154, San Jose, February 2006, 61540X, pp. 111. 7. S. van Haver, A.J.E.M. Janssen, P. Dirksen, J.J.M. Braat, "Extended NijboerZernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annular pupils," meeting digest EOS Advanced Imaging Techniques 2007, Lille, September 1214, 2007. 8. O.T.A. Janssen, S. van Haver, A.J.E.M. Janssen, J.J.M. Braat, H.P. Urbach, S.F. Pereira, "Extended NijboerZernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm," Proc. SPIE 6924, San Jose, February 2008, 692410, pp. 19. 9. S. van Haver, O.T.A. Janssen, A.J.E.M. Janssen, J.J.M. Braat, H.P. Urbach, S.F. Pereira, "General imaging of advanced 3D mask objects based on the fullyvectorial extended NijboerZernike (ENZ) theory," Proc. SPIE 6924, San Jose, February 2008, 69240U, pp. 18. Presentations at scientific meetings 1. P. Dirksen, J.J.M. Braat, P. De Bisschop, A.J.E.M. Janssen, C.A.H. Juffermans, A. Leeuwestein, "Characterization of a projection lens using the extended NijboerZernike approach," SPIE conference on Microlithography, Santa Clara, March 38, 2002. 2. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, A. van de Nes, "Extended NijboerZernike representation of the field in the focal region of an aberrated highaperture optical system," poster presented at the Annual Meeting of OSA, Orlando, October 2002. 3. P. Dirksen, J.J.M. Braat, A.J.E.M. Janssen, C. Juffermans, A. Leeuwestein, "Experimental determination of lens aberrations from the intensity pointspread function in the focal region," SPIE conference on Microlithography, Santa Clara, February 2328, 2003. 4. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, A.S. van de Nes, "Extended NijboerZernike description of the highaperture focal field created by a beam with angular momentum," presented at Focus on Microscopy 2003, Genova, April 1316, 2003. 5. P. Dirksen, J.J.M. Braat, A.J.E.M. Janssen, A. Leeuwestein, H. Kwinten, D. van Steenwinckel, "Determination of resist parameters using the extended NijboerZernike theory," SPIE conference on Microlithography, Santa Clara, February 2126, 2004. 6. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, A.S. van de Nes, "Quality assessment of focusing optics by aberration retrieval using the extended NijboerZernike diffraction theory," presented at Focus on Microscopy 2004, Philadelphia, April 47, 2004. 7. P. Dirksen, J.J.M. Braat, A.J.E.M. Janssen, D. van Steenwinckel, A. Leeuwestein, "Aberration retrieval for a lithographic lens in the presence of focus variation and spatial diffusion," IISB Lithography Simulation Workshop, Hersbruck, Germany, September 1719, 2004. 8. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, "Extended NijboerZernike analysis for vectorial diffraction calculations and aberration retrieval," IISB Lithography Simulation Workshop, Hersbruck, Germany, September 1719, 2004. 9. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, A.S. van de Nes, "Complex pupil function reconstruction using the extended NijboerZernike diffraction theory," abstract presented at OSA Annual Meeting, October 2004, Rochester, USA; corresponding poster presentation: "Complex pupil function reconstruction at high numerical aperture using the extended NijboerZernike diffraction theory". 10. P. Dirksen, J.J.M. Braat, A.J.E.M. Janssen, A. Leeuwestein, "Aberration retrieval for highNA optical systems using the Extended NijboerZernike theory," SPIE conference on Microlithography, San Jose, February 27  March 4, 2005. 11. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, A. van de Nes, "Polarisationaberration retrieval for highNA systems using the extended NijboerZernike diffraction theory," presented at Focus on Microscopy 2005, Jena, March 2024, 2005. 12. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, "Throughfocus pointspread function evaluation for lens metrology using the Extended NijboerZernike theory," presented at Fringe 2005, Stuttgart, September 1214, 2005. 13. J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, A. Leeuwestein, T. Matsuyama, T. Noda, "Aerial image based lens metrology for wafer steppers," presented at SPIE conference on Microlithography, San Jose, February 1924, 2006. 14. S. van Haver, J.J.M. Braat, P. Dirksen, A.J.E.M. Janssen, "HighNA lens characterization by throughfocus intensity measurements," presented at EOS Annual Meeting 2006 TOM 4, Paris, October 1619, 2006. 15. S. van Haver, A.J.E.M. Janssen, P. Dirksen, J.J.M. Braat, "Extended NijboerZernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annular pupils," poster presented at EOS Advanced Imaging Techniques 2007, Lille, September 1214, 2007. 16. S. van Haver, A.J.E.M. Janssen, P. Dirksen, J.J.M. Braat, "Imaging based on the Extended NijboerZernike (ENZ) formalism," presented at EOS Advanced Imaging Techniques 2007, Lille, September 1214, 2007. 17. S. van Haver, O.T.A. Janssen, A.M. Nugrowati, J.J.M. Braat, S.F. Pereira, "Novel approach to mask imaging based on the Extended NijboerZernike (ENZ) diffraction theory," poster presented at MNE'07, Copenhagen, September 2326, 2007. (Received 1st price in best poster award.) 18. O.T.A. Janssen, S. van Haver, A.J.E.M. Janssen, J.J.M. Braat, H.P. Urbach, S.F. Pereira, "Extended NijboerZernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm," presented at SPIE conference on Microlithography, San Jose, February 2008. 19. S. van Haver, O.T.A. Janssen, A.J.E.M. Janssen, J.J.M. Braat, H.P. Urbach, S.F. Pereira, "General imaging of advanced 3D mask objects based on the fullyvectorial extended NijboerZernike (ENZ) theory," presented at SPIE conference on Microlithography, San Jose, February 2008. 20. S. van Haver, O.T.A. Janssen, A.M. Nugrowati, J.J.M. Braat, S.F. Pereira, "Combining various optical simulation tools to enable complex optical system simulations," poster presented at NEMO meeting, Santiago de Compostela, Spain, July, 2008. 21. S. van Haver, O.T.A. Janssen, A.J.E.M. Janssen, J.J.M. Braat, S.F. Pereira, P. Evanschitzky, "Characterization of a novel mask imaging algorithm based on the Extended NijboerZernike (ENZ) formalism," poster presented at MNE conference, Athens, Greece, September, 2008. 22. S. van Haver, O.T.A. Janssen, J.J.M. Braat, S.F. Pereira, "An alternative method for advanced lithographic imaging: the Extended NijboerZernike formalism," lecture at 6th Fraunhofer IISB Lithography Simulation Workshop, Athens, Greece, September, 2008. 23. S. van Haver, O.T.A. Janssen, A.J.E.M. Janssen, J.J.M. Braat, S.F. Pereira, "Image simulations of extended objects using an algorithm based on the Extended NijboerZernike (ENZ) formalism," poster presented at the EOS Annual Meeting 2008, Paris, 29 September  3 October, 2008. (Received 1st price in best poster award.) 24. S. van Haver, A.J.E.M. Janssen, J.J.M. Braat, S.F. Pereira, "Evaluation of scaled and annular pupils within the framework of the Extended NijboerZernike (ENZ) formalism," poster presented at the OSA FiO 2008, Rochester NY, 19 October  23 October, 2008. 25. S. van Haver, O.T.A. Janssen, J.J.M. Braat, S.F. Pereira, "Characterization of a novel mask imaging algorithm based on the Extended NijboerZernike (ENZ) formalism," poster presented at MicroNano Conference, Wageningen, The Netherlands, November, 2008. (Same poster as presented at MNE 2008, see item 21.) 26. S. van Haver, A.J.E.M. Janssen, P. Dirksen, J.J.M. Braat, "Extended NijboerZernike based imaging into an image region containing a layered configuration," presented at EOS Advanced Imaging Techniques 2009, Jena, Germany, June 1012, 2009. 27. J.J.M. Braat, S. van Haver, S.F. Pereira, "Microlens quality assessment using the Extended NijboerZernike (ENZ) diffraction theory," presented at EOS Optical Microsystems 2009, Capri, Italy, September 2730, 2009. 28. S. van Haver, J.J.M. Braat, S.F. Pereira, "Accurate and efficient simulation of resist images generated by advanced lithographic systems using the Extended NijboerZernike (ENZ) diffraction theory," presented at MicroNano Conference, Delft, The Netherlands, November, 2009. 29. J.J.M. Braat, "Extended NijboerZernike diffraction theory," presented at the SPAM Winterschool, Delft, The Netherlands, January, 2011. arXiv publications 1.
A.J.E.M. Janssen, "Zernike circle polynomials and infinite integrals involving the product of Bessel functions,
" arXiv:1007.0667v1 [mathph] 5 Jul 2010, pp. 145. 2.
A.J.E.M. Janssen, "A generalization of the Zernike circle polynomials for forward and inverse problems in diffraction theory,
" arXiv:1110.2369v1 [mathph] 11 Oct 2011, pp. 143. 3.
A.J.E.M. Janssen, "Zernike expansions of derivatives and
Laplacians of the Zernike circle polynomials,
" arXiv:1404.1766v1 [mathph] 7 Apr 2014, pp. 131. 4.
S. van Haver, A.J.E.M. Janssen, "Truncation strategy for the series expressions
in the advanced ENZtheory of diffraction integrals,
" arXiv:1407.6589v1 [physics.compph] 24 July 2014, pp. 156. ANZ publications (journal papers and conference proceedings) 1.
R.M. Aarts, A.J.E.M. Janssen, "Onaxis and farfield sound radiation from resilient flat and domeshaped radiators," J. Acoust. Soc. Am. 125 (2009), pp. 14441455. 2.
R.M. Aarts, A.J.E.M. Janssen, "Sound radiation quantities arising from a resilient circular radiator," J. Acoust. Soc. Am. 126 (2009), pp.17761787. 3. R.M. Aarts, A.J.E.M. Janssen, "Estimating the velocity profile and acoustical quantities of a harmonically vibrating membrane from onaxis pressure data," presented at NAG/DAGA 2009 Conference, Rotterdam, March 2009. 4.
R.M. Aarts, A.J.E.M. Janssen, "Estimating the velocity profile and acoustical quantities of a harmonically vibrating loudspeaker membrane from onaxis pressure data," J. Audio Eng. Soc. 57 (2009), pp.10041015. 5. R.M. Aarts, A.J.E.M. Janssen, "Authors' reply to comments on ``Estimating the velocity profile and acoustical quantities of a harmonically vibrating loudspeaker membrane from onaxis pressure data", J. Audio Eng. Soc. 58 (2010), pp.308310. 6.
R.M. Aarts, A.J.E.M. Janssen, "Sound radiation from a resilient spherical cap on a rigid sphere," J. Acoust. Soc. Am. 127 (2010), pp.22622273. 7.
R.M. Aarts, A.J.E.M. Janssen, "Modeling a loudspeaker as a flexible cap on a rigid sphere," presented at AES 128th Convention, London, May 2010. 8. R.M. Aarts, A.J.E.M. Janssen, "Acoustic holography for piston sound radiation with nonuniform velocity profiles," presented at ICSV 17, Cairo, July 2010. 9. R.M. Aarts, A.J.E.M. Janssen, "Spatial impulse responses from a flexible baffled circular piston," J. Acoust. Soc. Am. 129 (2011), pp.29522959. 10. R.M. Aarts, A.J.E.M. Janssen, "Sound radiation of a nonrigid piston and pole cap compared with loudspeakers," presented at NAG Annual Meeting 2011, The Netherlands, March 2011.11. R.M. Aarts, A.J.E.M. Janssen, "Comparing sound radiation from a loudspeaker with that from a flexible spherical cap on a rigid sphere," J. Audio Eng. Soc. 59 (2011), pp.201212. 12. R.M. Aarts, A.J.E.M. Janssen, "Sound radiation from a loudspeaker, from a spherical pole cap, and from a piston in an infinite baffle," Noise&Vibration Worldwide (April 2012), pp. 1219.
